1. Dilution gas flow range: standard configuration: 0~10SLM; Optional: 0~5SLM, 0~20SLM
2. Standard gas flow range: standard configuration: 0~100sccm; Optional 0~50sccm0~200sccm
3. Flow control accuracy: ± 1% F.S
4. Flow linearity: ± (0.5~1)% F.S
5. Flow control repeatability: ± 0.2% F.S
6. Standard gas input port: 4
7. Dilution gas inlet: 1